書誌事項
- タイトル別名
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- Preparation of TiO2 Coating on Dental Metal Materials by Plasma CVD
- プラズマ CVDホウ ニ ヨル シカ キンゾク ザイリョウ エノ TiO2 コーティング
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抄録
In this study, TiO2 films were prepared on Ag-Pd alloys by Plasma-enhanced Chemical Vapor Deposition (PECVD) using Ti(O-i-Pr)2(dpm)2 precursor. Ag-Pd alloys are widely used as a substrate material of a resin-veneered dental crown. Since an adhesion of a dental resin to the Ag-Pd alloy substrate is poor, protuberances are usually formed on the substrate surface to sustain the mechanical retention. One of the weak points in the resin-veneered dental crown is that a mechanical retention should be indispensable to fix the resin onto the metal frame. Instead of mechanical retention, TiO2 films were prepared on the substrates.<BR>The effects of the deposition conditions on the crystalline phases, microstructures, and color of the deposited films were investigated. As a result, at a substrate pre-heating temperature Tdep=500°C, microwave power PM=2 kW, deposition pressure Ptot=0.4 or 0.7 kPa, the film color changed from black to white, and crystalline phase was anatase. And the microstructure of the film was granular. The grain size was a diameter of about 100 nm. These are optimum deposition conditions.
収録刊行物
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- 粉体および粉末冶金
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粉体および粉末冶金 55 (5), 331-335, 2008
一般社団法人 粉体粉末冶金協会
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詳細情報 詳細情報について
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- CRID
- 1390282681285903616
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- NII論文ID
- 10021173170
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- NII書誌ID
- AN00222724
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- COI
- 1:CAS:528:DC%2BD1cXms1Cqtb4%3D
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- ISSN
- 18809014
- 05328799
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- NDL書誌ID
- 9531547
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- 抄録ライセンスフラグ
- 使用不可