Realization of n-type and p-type Si-Microprobe Array Using In-Situ Doping with Selective Vapor-Liquid-Solid (VLS) Growth Method
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- ISLAM Md. Shofiqul
- Department of Electrical and Electronic Engineering Toyohashi University of Technology
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- ISHINO Hiroshi
- Department of Electrical and Electronic Engineering Toyohashi University of Technology
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- KAWANO Takeshi
- Department of Electrical and Electronic Engineering Toyohashi University of Technology
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- TAKAO Hidekuni
- Department of Electrical and Electronic Engineering Toyohashi University of Technology
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- SAWADA Kazuaki
- Department of Electrical and Electronic Engineering Toyohashi University of Technology
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- ISHIDA Makoto
- Department of Electrical and Electronic Engineering Toyohashi University of Technology
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Journal
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- Extended abstracts of the ... Conference on Solid State Devices and Materials
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Extended abstracts of the ... Conference on Solid State Devices and Materials 2004 176-177, 2004-09-15
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Details 詳細情報について
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- CRID
- 1570009750704859392
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- NII Article ID
- 10022538124
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- NII Book ID
- AA10777858
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- Text Lang
- en
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- Data Source
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- CiNii Articles