Realization of n-type and p-type Si-Microprobe Array Using In-Situ Doping with Selective Vapor-Liquid-Solid (VLS) Growth Method

  • ISLAM Md. Shofiqul
    Department of Electrical and Electronic Engineering Toyohashi University of Technology
  • ISHINO Hiroshi
    Department of Electrical and Electronic Engineering Toyohashi University of Technology
  • KAWANO Takeshi
    Department of Electrical and Electronic Engineering Toyohashi University of Technology
  • TAKAO Hidekuni
    Department of Electrical and Electronic Engineering Toyohashi University of Technology
  • SAWADA Kazuaki
    Department of Electrical and Electronic Engineering Toyohashi University of Technology
  • ISHIDA Makoto
    Department of Electrical and Electronic Engineering Toyohashi University of Technology

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Details 詳細情報について

  • CRID
    1570009750704859392
  • NII Article ID
    10022538124
  • NII Book ID
    AA10777858
  • Text Lang
    en
  • Data Source
    • CiNii Articles

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