Thermally Robust Y_2O_3/Ge MOS Capacitors

• NOMURA Hideyuki

  Department of Materials Engineering, School of Engineering, The University of Tokyo

• KITA Koji

  Department of Materials Engineering, School of Engineering, The University of Tokyo

• KYUNO Kentaro

  Department of Materials Engineering, School of Engineering, The University of Tokyo

• TORIUMI Akira

  Department of Materials Engineering, School of Engineering, The University of Tokyo

Journal

• Extended abstracts of the ... Conference on Solid State Devices and Materials

  Extended abstracts of the ... Conference on Solid State Devices and Materials 2005 858-859, 2005-09-13

Details

• CRID: 1572543025509391104
• NII Article ID: 10022543442
• NII Book ID: AA10777858
• Text Lang: en
• Data Source:
  • CiNii Articles