Characterization of Void in Bonded SOI Wafers by Controlling Coherence Length of Near-Infrared Microscope
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- AJARI Noritaka
- Department of Precision Science and Technology, Graduate School of Engineering, Osaka University
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- UCHIKOSHI Junichi
- Department of Precision Science and Technology, Graduate School of Engineering, Osaka University
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- HIROKANE Takaaki
- Department of Precision Science and Technology, Graduate School of Engineering, Osaka University
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- ARIMA Kennta
- Department of Precision Science and Technology, Graduate School of Engineering, Osaka University
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- MORITA Mizuho
- Department of Precision Science and Technology, Graduate School of Engineering, Osaka University
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- Extended abstracts of the ... Conference on Solid State Devices and Materials
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Extended abstracts of the ... Conference on Solid State Devices and Materials 2006 486-487, 2006-09-13
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- CRID
- 1573668925416080000
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- NII論文ID
- 10022545814
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- NII書誌ID
- AA10777858
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- 本文言語コード
- en
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- データソース種別
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