Characterization of Patterned Oxide Buried in Bonded Silicon-on-Insulator Wafers by Near-Infrared Scattering Topography and Microscopy
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- WU Xing
- Department of Precision Science and Technology, School of Engineering, Osaka University
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- UCHIKOSHI Junichi
- Department of Precision Science and Technology, School of Engineering, Osaka University
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- HIROKANE Takaaki
- Department of Precision Science and Technology, School of Engineering, Osaka University
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- YAMADA Ryuta
- Department of Precision Science and Technology, School of Engineering, Osaka University
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- ARIMA Kenta
- Department of Precision Science and Technology, School of Engineering, Osaka University
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- MORITA Mizuho
- Department of Precision Science and Technology, School of Engineering, Osaka University
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- Extended abstracts of the ... Conference on Solid State Devices and Materials
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Extended abstracts of the ... Conference on Solid State Devices and Materials 2007 394-395, 2007-09-19
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- CRID
- 1572543025509258880
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- NII論文ID
- 10022549248
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- NII書誌ID
- AA10777858
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- 本文言語コード
- en
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- データソース種別
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