Characteristics of Pure Ge_3N_4 Dielectric Layers Formed by High-Density Plasma Nitridation

• KUTSUKI Katsuhiro

  Graduate School of Engineering, Osaka University

• OKAMOTO Gaku

  Graduate School of Engineering, Osaka University

• HOSOI Takuji

  Graduate School of Engineering, Osaka University

• SHIMURA Takayoshi

  Graduate School of Engineering, Osaka University

• YASUTAKE Kiyoshi

  Graduate School of Engineering, Osaka University

• WATANABE Heiji

  Graduate School of Engineering, Osaka University

Journal

• Extended abstracts of the ... Conference on Solid State Devices and Materials

  Extended abstracts of the ... Conference on Solid State Devices and Materials 2007 1034-1035, 2007-09-19

Details

• CRID: 1570854175659206912
• NII Article ID: 10022551546
• NII Book ID: AA10777858
• Text Lang: en
• Data Source:
  • CiNii Articles