Author(s)

Journal

  • J. Vac. Sci. Technol. A

    J. Vac. Sci. Technol. A 7, 701, 1989

Cited by:  1

Codes

  • NII Article ID (NAID)
    10024253426
  • Article Type
    Journal Article
  • Data Source
    CJPref 
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