SEM with a Force Detection Manipulator

• ISHIKAWA Makoto

  Innovation Plaza Tokai, Japan Science and Technology Agency

• HARADA Ryuichi

  Department of Physics, Aichi University of Education

• SASAKI Naruo

  Department of Materials and Life Science, Faculty of Science and Technology, Seikei University

• MIURA Kouji

  Innovation Plaza Tokai, Japan Science and Technology Agency Department of Physics, Aichi University of Education

Bibliographic Information

Other Title

• 力検出機構を備えたマニュピレーションＳＥＭ
• チカラ ケンシュツ キコウ オ ソナエタ マニュピレーション SEM

Abstract

We have fabricated a manipulation system with a force detection, which uses a self-sensing cantilever, in a chamber of a scanning electron microscope. This system can simultaneously manipulate a nanoparticle and detect a force needed to move it, a detection resolution of which is approximately 1 nN. In this work, nanoscale peeling processes of a multi-walled carbon nanotube (MWCNT) on the graphite substrate have been studied.

Journal

• Hyomen Kagaku

  Hyomen Kagaku 29 (11), 713-715, 2008

  The Surface Science Society of Japan

Keywords

• combination SEM
• multi-walled carbon nanotube
• peeling
• self-detective cantilever
• nano-manipulation

Details

• CRID: 1390282681434265728
• NII Article ID: 10024407641
• NII Book ID: AN00334149
• DOI: 10.1380/jsssj.29.713
• ISSN: 18814743
• ISSN: 03885321
• NDL BIB ID: 9714392
• Web Site: http://id.ndl.go.jp/bib/9714392
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I9714392
• Web Site: http://www.jstage.jst.go.jp/article/jsssj/29/11/29_11_713/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed