Development of a Precise and High Response Pressure Regulator for Gases

• KAWASHIMA Kenji

  東京工業大学　精密工学研究所

• KATO Tomonori

  東京都立産業技術高等専門学校

• YAMAZAKI Shunpei

  東京工業大学大学院

• KAGAWA Toshiharu

  東京工業大学　精密工学研究所

Bibliographic Information

Other Title

• 気体用の超精密高速応答圧力レギュレータの開発
• キタイヨウ ノ チョウセイミツ コウソク オウトウ アツリョク レギュレータ ノ カイハツ

Abstract

The pressure regulator is a substantial element in a pneumatic system. In this paper, we propose a regulator that achieves precise pressure control with high a dynamic response using a pressure differentiator (PD sensor) which we have developed. The regulator consists of an isothermal chamber, a servo valve, a pressure sensor, a laminar flow meter, and the PD sensor. Slight changes of pressure in the chamber can be detected by the PD sensor and is fed back to the servo valve to maintain the pressure at a desired value. The effectiveness of the developed regulator was confirmed experimentally in comparison with commercially available pressure regulators.

Journal

• TRANSACTIONS OF THE JAPAN FLUID POWER SYSTEM SOCIETY

  TRANSACTIONS OF THE JAPAN FLUID POWER SYSTEM SOCIETY 38 (2), 29-34, 2007

  The Japan Fluid Power System Society

Keywords

• Pressure regulator
• Pressure control
• Isothermal chamber
• Pressure differentiator

Details

• CRID: 1390282680230822272
• NII Article ID: 10024634017
• NII Book ID: AA11597760
• ISSN: 13467719
• ISSN: 13497022
• ISSN: 18803121
• DOI: 10.5739/jfps.38.29
• NDL BIB ID: 8746298
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8746298
• Web Site: http://www.jstage.jst.go.jp/article/jfps/38/2/38_2_29/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed