真空ナノエレクトロニクスの現状と展望  [in Japanese] Recent progress in vacuum nanoelectronics  [in Japanese]

Access this Article

Search this Article

Author(s)

Abstract

<p>電子の走行媒体としての真空は,固体に比べて数々の利点を有している.一方,固体(半導体)技術は,従来の熱電子源の性能を超える微小な電子源の開発を可能にした.真空ナノエレクトロニクスは,微細加工技術・薄膜技術を駆使して,微小な真空デバイスを製作し,従来の真空や半導体デバイスの性能に勝る,応用デバイスの開発を目的とする,真空と固体の融合学術分野である.本稿では,真空ナノエレクトロニクスの基盤技術である,微小電子源の現状をデバイス応用の観点から記述する.また応用デバイスの現状と今後の展望についても述べる.</p>

<p>A vacuum has several advantages over a solid as an electron transport medium. On the other hand, solid technology enables the development of the micro- and nanocathodes, which have superior characteristics to thermal cathodes. Vacuum nanoelectronics is an emerging science field based on the fusion of vacuum and solid technologies with the aim of developing superior devices to present vacuum and semiconductor devices by the fabrication of microvacuum devices using microfabrication and thin-film technologies. In this paper we describe the present status of the micro- and nanocathodes, which are the principal devices in vacuum nanoelectronics. We also describe the current status and future prospects of devices applying vacuum nanoelectronics.</p>

Journal

  • Oyo Buturi

    Oyo Buturi 78(4), 301-307, 2009-04-10

    The Japan Society of Applied Physics

References:  45

Codes

  • NII Article ID (NAID)
    10024751312
  • NII NACSIS-CAT ID (NCID)
    AN00026679
  • Text Lang
    JPN
  • Article Type
    REV
  • ISSN
    03698009
  • NDL Article ID
    10256692
  • NDL Source Classification
    ZM17(科学技術--科学技術一般--力学・応用力学)
  • NDL Call No.
    Z15-243
  • Data Source
    CJP  NDL  J-STAGE 
Page Top