加工用AFMカンチレバーによるLSI多重層の単一層除去加工  [in Japanese] Removal of a single layer from multiple layers in LSI using machining cantilever in AFM  [in Japanese]

Search this Article

Author(s)

Journal

  • Journal of the Japan Society for Abrasive Technology

    Journal of the Japan Society for Abrasive Technology 53(6), 385-387, 2009-06-01

    砥粒加工学会

References:  2

Codes

  • NII Article ID (NAID)
    10024777848
  • NII NACSIS-CAT ID (NCID)
    AN10192823
  • Text Lang
    JPN
  • Article Type
    SHO
  • ISSN
    09142703
  • NDL Article ID
    10321531
  • NDL Source Classification
    ZN11(科学技術--機械工学・工業)
  • NDL Call No.
    Z16-1147
  • Data Source
    CJP  NDL 
Page Top