Problem of Gas Dose with Micro-Capillary Array

• SUGIMOTO Toshiki

  Institute of Industrial Science, University of Tokyo

• OKANO Tatsuo

  Institute of Industrial Science, University of Tokyo CREST-JST

• FUKUTANI Katsuyuki

  Institute of Industrial Science, University of Tokyo CREST-JST

Bibliographic Information

Other Title

• キャピラリーアレイを用いたガスドーズにおける問題点
• キャピラリー アレイ オ モチイタ ガスドーズ ニ オケル モンダイテン

Abstract

  We have developed a Micro-Capillary-Array (MCA) Beam Doser in order to dose a collimated molecular beam. Whereas the response of the chamber pressure was fast in the dosage of N₂, D₂ and Ar, the pressure response to the NO dosage was slow with a delay of about 5 s. When gases pass through an MCA with a large length to radius ratio as a free molecular flow, they repeatedly collide with the MCA walls. It was found that gases that have a small residence time (τ) pass through the MCA without substantial delay. On the other hand, those with large τ reveal a delayed flow, and it takes a few seconds to attain a steady-state flow.<br>

Journal

• Journal of the Vacuum Society of Japan

  Journal of the Vacuum Society of Japan 52 (3), 141-144, 2009

  The Vacuum Society of Japan

Keywords

• Spectroscopy
• Surfaces and Interfaces
• Instrumentation
• General Materials Science

Details

• CRID: 1390001205295140352
• NII Article ID: 10024897857
• NII Book ID: AA12298652
• DOI: 10.3131/jvsj2.52.141
• ISSN: 18824749
• ISSN: 18822398
• NDL BIB ID: 10256368
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I10256368
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed