Dependence of acid generation efficiency on molecular structures of acid generators upon exposure to extreme ultraviolet radiation

• Ryo Hirose

• Takahiro Kozawa

• Seiichi Tagawa

Journal

• Applied physics express : APEX

  Applied physics express : APEX 1 (2), 2008-02

  Tokyo : Japan Society of Applied Physics

Details

• CRID: 1523669555742253696
• NII Article ID: 10025079296
• NII Book ID: AA12295133
• ISSN: 18820778
• NDL BIB ID: 9393434
• Web Site: http://id.ndl.go.jp/bib/9393434
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I9393434
• Text Lang: en
• NDL Source Classification:
  • ZM35(科学技術--物理学)
• Data Source:
  • NDL
  • CiNii Articles