Atomic Layer Fluorination of Highly Oriented Pyrolytic Graphite using Hyperthermal Atomic Fluorine Beam
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- Tagawa Masahito TAGAWA Masahito
- Graduate School of Engineering, Kobe University
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- Yokota Kumiko YOKOTA Kumiko
- Graduate School of Engineering, Kobe University
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- Maeda Ken-ichi [他] MAEDA Ken-ichi
- Graduate School of Engineering, Kobe University
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- YOSHIGOE Akitaka
- Japan Atomic Energy Agency
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- TERAOKA Yuden
- Japan Atomic Energy Agency
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Author(s)
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- Tagawa Masahito TAGAWA Masahito
- Graduate School of Engineering, Kobe University
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- Yokota Kumiko YOKOTA Kumiko
- Graduate School of Engineering, Kobe University
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- Maeda Ken-ichi [他] MAEDA Ken-ichi
- Graduate School of Engineering, Kobe University
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- YOSHIGOE Akitaka
- Japan Atomic Energy Agency
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- TERAOKA Yuden
- Japan Atomic Energy Agency
Journal
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- Applied physics express
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Applied physics express 2(6), "66002-1"-"66002-3", 2009-06-25
Japan Society of Applied Physics
References: 15
-
1
- <no title>
-
CALEDONIA G. E.
AIAA J. 25, 59, 1987
Cited by (1)
-
2
- <no title>
-
GIAPIS K. P.
J. Vac. Sci. Technol. A 13, 959, 1995
Cited by (1)
-
3
- <no title>
-
TAGAWA M.
Jpn. J. Appl. Phys. 37, L1455, 1998
Cited by (1)
-
4
- <no title>
-
TAGAWA M.
Jpn. J. Appl. Phys. 40, 6152, 2001
Cited by (1)
-
5
- <no title>
-
TAGAWA M.
J. Adhes. Sci. Technol. 18, 243, 2004
Cited by (1)
-
6
- <no title>
-
KATO Y.
Jpn. J. Appl. Phys. 45, 7978, 2006
Cited by (1)
-
7
- <no title>
-
TANUMA S.
Surf. Interface Anal. 21, 165, 1994
Cited by (1)
-
8
- <no title>
-
MARTON D.
Phys. Rev. B 48, 6757, 1993
Cited by (1)
-
9
- <no title>
-
BEAMSON G.
High Resolution XPS of Organic Polymers : Scienta300 Database 278, 1992
Cited by (1)
-
10
- <no title>
-
TAGAWA M.
Polyimides and Other High Temperature Polymers : Synthesis, Charactrerization and Applications 5, 249, 2009
Cited by (1)
-
11
- <no title>
-
MINTON T. K.
Chemical Reactions in Extreme Environments 420, 2004
Cited by (1)
-
12
- <no title>
-
CHU X.
Surf. Sci. 268, 325, 1992
Cited by (1)
-
13
- <no title>
-
KINOSHITA H.
Surf. Sci. 440, 49, 1999
Cited by (1)
-
14
- <no title>
-
TAGAWA M.
J. Spacecraft Rockets 39, 447, 2002
Cited by (4)
-
15
- <no title>
-
SAITOH Y.
Nucl. Instrum. Methods Phys. Res., Sect. A 474, 253, 2001
Cited by (7)