エキシマレーザー照射によるh-BNからのアブレーションプラズマの特性  [in Japanese] Characterization of Ablation Plasma from h-BN by Excimer Laser Irradiation  [in Japanese]

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Author(s)

Abstract

  Characteristics of the plume plasma produced by UV (λ=308 nm) laser ablation of a hot-pressed hexaganol boron nitride (h-BN) target have been investigated in a high vacuum at a laser power density ranging from 0.1 to 3.2×10<sup>8</sup> W/cm<sup>2</sup>. Time-resolved detection of the ablated species has been achieved by using a quadrupole mass spectrometer and an ion probe. The average kinetic energy of ablated B<sup>+</sup> is much larger than that of B, and increases with an increase in the laser power density, whereas the acceleration of neutral B is limited. The ionization degree in the plasma varies from 0.1 to 15% with increasing laser power density. The angular distributions of the ion flux and the total particle flux can be fitted by a cosine or a bicosine function and strongly depend on the laser power density.<br>

Journal

  • Journal of the Vacuum Society of Japan

    Journal of the Vacuum Society of Japan 52(6), 369-371, 2009-06-20

    The Vacuum Society of Japan

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Codes

  • NII Article ID (NAID)
    10025184894
  • NII NACSIS-CAT ID (NCID)
    AN00119871
  • Text Lang
    JPN
  • Article Type
    SHO
  • ISSN
    18822398
  • NDL Article ID
    10365552
  • NDL Source Classification
    ZN15(科学技術--機械工学・工業--流体機械)
  • NDL Call No.
    Z16-474
  • Data Source
    CJP  NDL  J-STAGE 
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