Current Status of Microplasma Research

• TACHIBANA Kunihide

  Department of Electronic Science and Engineering, Kyoto University

Journal

• IEEJ Trans.

  IEEJ Trans. 1 (2), 145-155, 2006-08-01

Keywords

• microplasma
• microdischarge
• plasma diagnostics
• material processing
• chemical analyses
• photonic devices
• plasma photonic crystals

Details

• CRID: 1571135650896061568
• NII Article ID: 10025770945
• NII Book ID: AA12144998
• ISSN: 19314973
• Text Lang: en
• Data Source:
  • CiNii Articles