最先端電子顕微鏡による局所構造・組成評価  [in Japanese] Advanced electron microscopy for integrated local analysis  [in Japanese]

Access this Article

Search this Article

Author(s)

Abstract

<p>電子顕微鏡は,物質・材料の局所構造評価法として強力な手法であり,近年の球面収差補正技術の急速な進歩とも相まってその分解能は格段に向上している.本稿では,特にその進展が著しい走査型透過電子顕微鏡法(STEM)に着目し,基本的な結像や分光分析の原理を実際の観察例とともに述べる.</p>

<p>Transmission electron microscopy plays an important key role in the microstructural analysis of materials, and the recent development of a spherical-aberration corrector makes it possible to achieve resolution approaching the sub-Å scale. We describe a state-of-the-art electron microscopy by focusing on scanning transmission electron microscopy (STEM), which provides incoherent Z-contrast atomic images, energy-dispersive x-ray spectroscopy (EDS) and electron energy-loss spectroscopy (EELS) at the same local region even at sub-nanometer scale.</p>

Journal

  • Oyo Buturi

    Oyo Buturi 79(4), 293-297, 2010-04-10

    The Japan Society of Applied Physics

References:  12

  • <no title>

    日本結晶学会誌 47(1), 2005

    Cited by (1)

  • <no title>

    PENNYCOOK S. J.

    Phys. Rev. Lett. 64, 938, 1990

    Cited by (1)

  • <no title>

    PENNYCOOK S. J.

    Ultramicroscopy 37, 14, 1991

    Cited by (1)

  • <no title>

    WEICKENMEIER A.

    Acta Crystallogr. A 47, 590, 1991

    Cited by (1)

  • <no title>

    VOYLES P. M.

    Nature 416, 826, 2002

    Cited by (1)

  • <no title>

    COLLIEX C.

    Ultramicroscopy 1, 301, 1976

    Cited by (1)

  • <no title>

    KIMOTO K.

    Nature 450, 702, 2007

    Cited by (1)

  • <no title>

    MULLER D. A.

    Science 319, 702, 2008

    Cited by (1)

  • <no title>

    CREW A. V.

    Science 168, 1338-1340, 1970

    DOI  Cited by (11)

  • <no title>

    HOWIE A.

    Journal of Microscopy-Oxford 117, 11-23, 1979

    Cited by (8)

  • <no title>

    HAIDER M.

    Nature 392, 768, 1998

    DOI  Cited by (18)

  • <no title>

    NELLIST P D

    Science 305, 1741, 2004

    DOI  Cited by (10)

Codes

  • NII Article ID (NAID)
    10026199618
  • NII NACSIS-CAT ID (NCID)
    AN00026679
  • Text Lang
    JPN
  • Article Type
    REV
  • ISSN
    03698009
  • NDL Article ID
    10651575
  • NDL Source Classification
    ZM17(科学技術--科学技術一般--力学・応用力学)
  • NDL Call No.
    Z15-243
  • Data Source
    CJP  NDL  J-STAGE 
Page Top