集束プロトンビーム描画による高アスペクト比構造の加工とその応用  [in Japanese] High-Aspect-Ratio Structures by Proton Beam Writing and Its Applications  [in Japanese]

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Author(s)

Journal

  • Ionizing radiation.

    Ionizing radiation. 35(2), 77-86, 2009-12-01

    応用物理学会放射線分科会

References:  19

Codes

  • NII Article ID (NAID)
    10026204511
  • NII NACSIS-CAT ID (NCID)
    AN00313954
  • Text Lang
    JPN
  • Article Type
    REV
  • ISSN
    02853604
  • NDL Article ID
    10551087
  • NDL Source Classification
    ZM35(科学技術--物理学)
  • NDL Call No.
    Z15-432
  • Data Source
    CJP  NDL 
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