Deposition of Wave-shaped Layered Low-k Dielectric a-C:F Films by C8F18 Plasma CVD
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- Mizuno Kouichiro
- Graduate School of Information Science and Technology, Hokkaido University
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- Sugawara Hirotake
- Graduate School of Information Science and Technology, Hokkaido University
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- Murayama Akihiro
- Graduate School of Information Science and Technology, Hokkaido University
Bibliographic Information
- Other Title
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- C8F18プラズマCVDによる非晶質フッ化炭素低誘電率絶縁膜の波状構造積層堆積
- C8F18 プラズマ CVD ニ ヨル ヒショウシツ フッカ タンソ テイユウデンリツ ゼツエン マク ノ ハジョウ コウゾウ セキソウ タイセキ
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Abstract
We have composed amorphous fluorocarbon (a-C:F) polymer films, which are low-k insulators, by plasma-enhanced chemical vapor deposition using C8F18 as the feedstock. In our previous attempts to form multi-layered a-C:F films under various combinations of plasma power density P and deposition time T, it was found that a-C:F films deposited at a high P (typically 2.0 W/cm3) in a short T (∼1 min) became wavy when they are deposited on other a-C:F films deposited at a low P (0.2 W/cm3). A heating experiment for the films showed that their thermal tolerance was dependent on P; films deposited at 0.2 W/cm3 started to melt at 250-270°C, while those deposited at 2.0 W/cm3 did at 350-370°C. It is considered that species of the precursors for the a-C:F film deposition are determined by P through the degree of C8F18 decomposition. The waving is induced by heating the lower layer during the deposition of the upper layer. The following conditions are necessary for the waving; the lower layer is deposited at a low P, the upper layer is deposited at a temperature at which the lower layer expands but does not melt, and the upper layer is not thickened excessively to keep its flexibility.
Journal
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- IEEJ Transactions on Fundamentals and Materials
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IEEJ Transactions on Fundamentals and Materials 130 (4), 319-324, 2010
The Institute of Electrical Engineers of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390282679574971904
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- NII Article ID
- 10026225577
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- NII Book ID
- AN10136312
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- ISSN
- 13475533
- 03854205
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- NDL BIB ID
- 10647801
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
- KAKEN
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- Abstract License Flag
- Disallowed