Dynamic Glancing-angle Deposition in Plasma Environments

• INOUE Yasushi

  名古屋大学

• TAKAI Osamu

  名古屋大学

Bibliographic Information

Other Title

• プラズマ環境における動的斜め堆積法

Journal

• Journal of The Surface Finishing Society of Japan

  Journal of The Surface Finishing Society of Japan 61 (2), 209-, 2010

  The Surface Finishing Society of Japan

Keywords

• General Engineering

Details

• CRID: 1390282679095932160
• NII Article ID: 10026348706
• NII Book ID: AN1005202X
• DOI: 10.4139/sfj.61.209
• ISSN: 18843409
• ISSN: 09151869
• Text Lang: ja
• Data Source:
  • JaLC
  • Crossref
  • CiNii Articles
  • KAKEN