Impact of High Heating Rate, Low Temperature, and Short Time Annealing on the Realization of Low Resistivity Cu Wire
-
- Onuki Jin
- Department of Materials Science and Engineering, Ibaraki University
-
- Tamahashi Kunihiro
- Department of Materials Science and Engineering, Ibaraki University
-
- Namekawa Takashi
- Department of Materials Science and Engineering, Ibaraki University
-
- Sasajima Yasushi
- Department of Materials Science and Engineering, Ibaraki University
Search this article
Abstract
Low resistivity Cu wires were obtained by high heating rate, short time, and low temperature annealing even at a temperature 100 K lower and for a time 67% shorter than the conventional H2 annealing temperature and time. This was due to promotion of the grain growth by the release of grain boundary energy when the heating rate to the peak temperature was set at 1.7 K/s. Resistivity of Cu wires made by the new process at 573 K was lower than that of wires made by conventional H2 annealing at 673 K for 30 min.
Journal
-
- MATERIALS TRANSACTIONS
-
MATERIALS TRANSACTIONS 51 (9), 1715-1717, 2010
The Japan Institute of Metals and Materials
- Tweet
Keywords
Details 詳細情報について
-
- CRID
- 1390282679225963904
-
- NII Article ID
- 10026600440
- 130004454545
-
- NII Book ID
- AA1151294X
-
- ISSN
- 13475320
- 13459678
-
- NDL BIB ID
- 10803483
-
- Text Lang
- en
-
- Data Source
-
- JaLC
- NDL
- Crossref
- CiNii Articles
-
- Abstract License Flag
- Disallowed