Decomposition of tetrafluoromethane by water plasma generated under atmospheric pressure

Author(s)

Journal

  • Thin Solid Films

    Thin Solid Films 518(3), 929-935, 2009

Cited by:  1

Codes

  • NII Article ID (NAID)
    10027634572
  • Article Type
    Journal Article
  • Data Source
    CJPref 
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