Strain distribution analysis of sputter-formed strained Si by tip-enhanced Raman spectroscopy

• Hiroaki Hanafusa

• Nobumitsu Hirose

• Akifumi Kasamatsu

Bibliographic Information

Other Title

• Strain distribution analysis of sputter formed strained Si by tip enhanced Raman spectroscopy

Journal

• Applied physics express : APEX

  Applied physics express : APEX 4 (2), 025701-, 2011-02

  Tokyo : Japan Society of Applied Physics

Keywords

• General Physics and Astronomy
• General Engineering

Details

• CRID: 1523106605306951552
• NII Article ID: 10027783571
• NII Book ID: AA12295133
• ISSN: 18820778
• ISSN: 18820786
• DOI: 10.1143/apex.4.025701
• NDL BIB ID: 10981880
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I10981880
• Web Site: http://stacks.iop.org/1882-0786/4/i=2/a=025701/pdf
• Text Lang: en
• NDL Source Classification:
  • ZM35(科学技術--物理学)
• Data Source:
  • NDL
  • Crossref
  • CiNii Articles