Raman scattering spectroscopy of residual stresses in epitaxial AlN films

• Shibo Yang

• Reina Miyagawa

• Hideto Miyake

Journal

• Applied physics express : APEX

  Applied physics express : APEX 4 (3), 031001-, 2011-03

  Tokyo : Japan Society of Applied Physics

Keywords

• General Physics and Astronomy
• General Engineering

Details

• CRID: 1523951030625357568
• NII Article ID: 10028155120
• NII Book ID: AA12295133
• ISSN: 18820778
• ISSN: 18820786
• DOI: 10.1143/apex.4.031001
• NDL BIB ID: 11054042
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I11054042
• Web Site: http://stacks.iop.org/1882-0786/4/i=3/a=031001/pdf
• Text Lang: en
• NDL Source Classification:
  • ZM35(科学技術--物理学)
• Data Source:
  • NDL
  • Crossref
  • CiNii Articles