A new, high precision, quick response pressure regulator for active control of pneumatic vibration isolation tables

• KATO Tomonori

  Tokyo Metropolitan College of Industrial Technology

• KAWASHIMA Kenji

  Tokyo Institute of Technology

• FUNAKI Tatsuya

  National Metrology Institute of Japan, AIST

• TADANO Kotaro

  Tokyo Institute of Technology

• KAGAWA Toshiharu

  Tokyo Institute of Technology

Journal

• Precision engineering

  Precision engineering 34 (1), 43-48, 2010-01-01

Keywords

• Vibration isolation table
• Pressure control
• Pressure regulator
• Pressure differential sensor

Details

• CRID: 1571698599984882944
• NII Article ID: 10029042235
• NII Book ID: AA11537543
• ISSN: 01416359
• Text Lang: en
• Data Source:
  • CiNii Articles