高純度めっき材料を用いた低抵抗率Cu配線形成プロセスの8インチウエハによる検証  [in Japanese] Investigation of the Low Resistivity Cu Wire Formation in the 8 Inch Wafer Using Ultra-High Purity Plating Materials  [in Japanese]

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Author(s)

    • 田代 優 TASHIRO Suguru
    • 茨城大学工学部マテリアル工学科 Department of Material Science and Engineering, Faculty of Engineering, Ibaraki University
    • 門田 裕行 KADOTA Hiroyuki
    • 日立協和エンジニアリング株式会社デバイスシステムセンタ Device Systems Center, Hitachi Kyowa Engineering Co., Ltd.
    • 伊藤 雅彦 [他] ITO Masahiko
    • 茨城大学工学部マテリアル工学科 Department of Material Science and Engineering, Faculty of Engineering, Ibaraki University
    • 三村 耕司 MIMURA Kouji
    • 東北大学多元物質科学研究所 Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
    • 一色 実 ISSIKI Minoru
    • 東北大学多元物質科学研究所 Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
    • 大貫 仁 ONUKI Jin
    • 茨城大学工学部マテリアル工学科 Department of Material Science and Engineering, Faculty of Engineering, Ibaraki University

Abstract

  We have confirmed the effectiveness of ultra-high purity plating material on the formation of low resistivity Cu wires for 22 nm level ULSIs using 8 inch wafer. The resistivity of the 30 nm wide Cu wires formed by ultra-high purity process is found to be 30% lower than those for Cu wires fabricated by the conventional process. It was also found that the grain size of the ultra- high purity processed Cu wires is larger than that of the conventional processed Cu wires by 30%, and the grain size is much more uniform. This innovative new process is expected to be one of the powerful candidates as the Cu wire forming process for 22 nm level ULSIs.<br>

Journal

  • Journal of the Japan Institute of Metals and Materials

    Journal of the Japan Institute of Metals and Materials 75(7), 386-391, 2011-07-01

    The Japan Institute of Metals and Materials

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Codes

  • NII Article ID (NAID)
    10029368773
  • NII NACSIS-CAT ID (NCID)
    AN00062446
  • Text Lang
    JPN
  • Article Type
    ART
  • ISSN
    00214876
  • NDL Article ID
    11171491
  • NDL Source Classification
    ZP41(科学技術--金属工学・鉱山工学)
  • NDL Call No.
    Z17-314
  • Data Source
    CJP  NDL  J-STAGE 
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