プラズマ援用研磨による4H-SiC(0001)表面の高品位仕上げ加工  [in Japanese] High-integrity finishing of 4H-SiC (0001) by plasma-assisted polishing  [in Japanese]

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Author(s)

Journal

  • Journal of the Japan Society for Abrasive Technology

    Journal of the Japan Society for Abrasive Technology 55(9), 534-539, 2011-09-01

    砥粒加工学会

References:  13

Codes

  • NII Article ID (NAID)
    10029507410
  • NII NACSIS-CAT ID (NCID)
    AN10192823
  • Text Lang
    JPN
  • Article Type
    ART
  • ISSN
    09142703
  • NDL Article ID
    11223916
  • NDL Source Classification
    ZN11(科学技術--機械工学・工業)
  • NDL Call No.
    Z16-1147
  • Data Source
    CJP  NDL 
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