フィードバック形エアマイクロ変位センサ

• 張 亜林

  東京工業大学大学院総合理工学研究科

• 藤田 壽憲

  東京電機大学工学部機械情報工学科

• 大隈 雄三郎

  SES研究所

• 川嶋 健嗣

  東京工業大学精密工学研究所

• 香川 利春

  東京工業大学精密工学研究所

書誌事項

タイトル別名

• A New Type of Displacement Sensor with Pneumatic Feedback System.
• フィードバックガタ エアマイクロ ヘンイ センサ

抄録

In this paper, a new type of displacement sensor with pneumatic feedback system is proposed. The piston of the sensor can follow a measured object automatically by a pneumatic servomechanism with a nozzle-flapper as a sensor. For precise measurement, the piston is supported by an air bearing and has very low friction. The gap between the nozzle and the measured object is kept fixed, so that the displacement of the measured object can be detected by measuring the displacement of the piston by an optical linear scale attached to it. As a result, this sensor can realize noncontacting displacement measurements and has a much longer measuring range compared with the traditional air micrometer.<BR>The optimal parameters of the sensor structure are obtained by means of simulation and experiment. When the accuracy of the sensor is verified using a micrometer, the repeatability error of the sensor is below ±0.5μm and the linearity error of senor is below ±2μm with a measuring range beyond 10mm. It is concluded that this sensor has sufficient accuracy, with the resolution of linear scale to be 0.5μm.

収録刊行物

• 日本フルードパワーシステム学会論文集

  日本フルードパワーシステム学会論文集 34 (1), 8-13, 2003

  一般社団法人 日本フルードパワーシステム学会

キーワード

• Pneumatics
• Sensor
• Displacement Measurement
• Air Micro Meter
• Pneumatic Servo
• Nozzle-Flapper

詳細情報

• CRID: 1390001205255595264
• NII論文ID: 10029929539
• NII書誌ID: AA11597760
• ISSN: 13467719
• ISSN: 13497022
• ISSN: 18803121
• DOI: 10.5739/jfps.34.8
• NDL書誌ID: 6437791
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I6437791
• Web Site: http://www.jstage.jst.go.jp/article/jfps/34/1/34_1_8/_pdf
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可