YAGレーザを用いたSnO_2系薄膜パターンの高速加工とその加工メカニズムに関する研究 Mechanism and rapid process of YAG laser process on SnO_2 system thin films

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著者

    • 臼井 玲大 USUI Reo
    • 大阪大学大学院工学研究科マテリアル生産科学専攻 Department of Materials and Manufacturing Science, Graduate School of Engineering, Osaka University
    • 佐藤 了平 SATOH Ryohei
    • 大阪大学先端科学イノベーションセンター Center for Advanced Science and Innovation, Osaka University
    • 三原 雄 MIHARA Yu
    • 大阪大学工学研究科マテリアル生産科学専攻 Department of Materials and Manufacturing Science, Graduate School of Engineering, Osaka University
    • 森永 英二 MORINAGA Eiji
    • 大阪大学工学研究科マテリアル生産科学専攻 Department of Materials and Manufacturing Science, Graduate School of Engineering, Osaka University
    • 磯野 貴充 ISONO Takamitsu
    • 大阪大学大学院工学研究科生産科学専攻 Department of Manufacturing Science, Graduate School of Engineering, Osaka University

抄録

Nano-second pulsed Nd:YAG laser (1064nm) process on SnO<sub>2</sub> system thin films on glass as transparent electrode for Flat Panel Displays(FPD) was investigated in this paper. Mechanism of laser ablation, which is an interaction between material and laser, was studied to approach low energy process for mass production application. It was found that carrier concentration is an important factor influencing the process from energy absorption mechanism of free electron vibration induced by laser. The process needed high carrier concentration for low energy process. Experiments showed threshold of the process was about 4.0x10<sup>25</sup>m<sup>-3</sup> of carrier concentration. However, some showed exception of successful process with even low carrier concentration. Then an additional mechanism that YAG photon (1.16eV) excites electrons trapped at deep level to conductive band was inferred. Deep level was measured by cathode luminescence spectroscopy, and result showed existence of electron at less than 1.16eV. It is understood that SnO<sub>2</sub> system thin films absorb laser energy through complex process of free electrons vibration and deep level electrons excitation. Considering the mechanisms, it is the first to achieve 20mJ/mm<sup>2</sup> of low energy process. This result leads to high process speed and good prospect of the laser process for mass production application for FPD.

収録刊行物

  • 溶接学会論文集 : quarterly journal of the Japan Welding Society

    溶接学会論文集 : quarterly journal of the Japan Welding Society 27(1), 48-54, 2010-01-20

    一般社団法人 溶接学会

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各種コード

  • NII論文ID(NAID)
    10030148566
  • NII書誌ID(NCID)
    AN1005067X
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    02884771
  • データ提供元
    CJP書誌  J-STAGE 
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