Extreme ultraviolet source using a laser-produced plasma for surface analysis

• KAKU M.

  Department of Electrical and Electronic Engineering, University of Miyazaki

• MATSUURA Y.

  Department of Electrical and Electronic Engineering, University of Miyazaki

• KATTO M.

  Cooperative Research Center, University of Miyazaki

• YOKOTANI A.

  Department of Electrical and Electronic Engineering, University of Miyazaki

• KUBODERA S.

  Department of Electrical and Electronic Engineering, University of Miyazaki

• SASAKI W.

  NTP Inc.

• MIYABAYASHI N.

  ESCO, Ltd.

Bibliographic Information

Other Title

• レーザー生成プラズマ極端紫外光源の開発と表面分析への応用

Journal

• レーザー学会研究会報告 = Reports on the Topical meeting of the Laser Society of Japan

  レーザー学会研究会報告 = Reports on the Topical meeting of the Laser Society of Japan 420 25-29, 2011-12-08

Keywords

• Extreme ultraviolet
• Laser-produced plasma
• Photon-stimulated desorption

Details

• CRID: 1574231875511285888
• NII Article ID: 10030151326
• NII Book ID: AA11604414
• Text Lang: ja
• Data Source:
  • CiNii Articles