Sub-Nanometer Length Measurement System Using a fs-comb

• KAJIMA Mariko

  AIST, NMIJ, Tsukuba Central3, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8563

• MINOSHIMA Kaoru

  AIST, NMIJ, Tsukuba Central3, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8563

Bibliographic Information

Other Title

• 光コムを利用したサブナノメートル測長技術の開発
• ヒカリ コム オ リヨウ シタ サブナノメートルソクチョウ ギジュツ ノ カイハツ

Abstract

A length measurement system with sub-nanometer accuracy was developed. The system used the optical

Journal

• The Review of Laser Engineering

  The Review of Laser Engineering 39 (11), 842-846, 2011

  The Laser Society of Japan

Keywords

• zooming interferometer
• which could improve the resolution and accuracy of a laser interferometer. Two

Details

• CRID: 1390001204650350720
• NII Article ID: 10030151735
• NII Article ID: 10031005940
• NII Book ID: AN00255326
• DOI: 10.2184/lsj.39.842
• ISSN: 13496603
• ISSN: 03870200
• NDL BIB ID: 023338801
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I023338801
• Web Site: https://www.jstage.jst.go.jp/article/lsj/39/11/39_842/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed