Characterization of Mechanical Properties of Cantilevered Nd₂Fe14B/Ta Magnetic Microstructures Characterization of Mechanical Properties of Cantilevered Nd2Fe14B/Ta Magnetic Microstructures

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著者

    • Zhang Deyuan
    • School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China
    • Cai Jun
    • School of Mechanical Engineering and Automation, Beihang University, Beijing 100191, China
    • Higuchi Kohei
    • Maenaka Human-Sensing Fusion project, ERATO, Japan Science and Technology Agency, Himeji, Hyogo 671-2280, Japan
    • Maenaka Kazusuke
    • Maenaka Human-Sensing Fusion project, ERATO, Japan Science and Technology Agency, Himeji, Hyogo 671-2280, Japan

抄録

The mechanical properties of low-stress cantilevered Nd2Fe14B/Ta multilayered microstructures are characterized. The cantilevered microstructures are fabricated using silicon molding technique and XeF2 gas-phase silicon etching process. The magnetic microcantilevers show relatively high quality factors varying from 75 to 135. The Young's modulus of the Nd2Fe14B/Ta multilayered film is evaluated by fitting the resonance response of the microcantilevers, which is smaller than those of bulk Nd2Fe14B magnets due to the texture effect. The good mechanical properties of the microcantilevers indicate that Nd2Fe14B/Ta multilayered films can be used as a structural material for microsystem applications. In addition, the electromagnetic driving of the Nd2Fe14B/Ta magnetic microcantilever is also demonstrated.

収録刊行物

  • Applied physics express

    Applied physics express 4(11), 116401-116401-3, 2011-11-25

    The Japan Society of Applied Physics

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各種コード

  • NII論文ID(NAID)
    10030153926
  • NII書誌ID(NCID)
    AA12295133
  • 本文言語コード
    EN
  • 資料種別
    ART
  • ISSN
    18820778
  • NDL 記事登録ID
    023321462
  • NDL 請求記号
    Z78-A526
  • データ提供元
    CJP書誌  NDL  JSAP 
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