Microfabrication of Silicon Hydrogenated Thin Targets for Multi-MeV Laser-Driven Proton Acceleration

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An ad hoc microfabrication technique was employed for the optimization of thin hydrogenated silicon membranes for the first experimental application in the field of laser-driven proton acceleration. The tetra methyl ammonium hydroxide wet etching and further microfabrication processes allowed the optimization of the target structure and geometry. Samples were doped in a H2 environment during an annealing process at 420 °C in order to increase the hydrogen concentration in the silicon matrix. This solution enabled the production of high-current (about 100 mA at 1 m from the source) and multi-MeV proton beams.

収録刊行物

  • Applied physics express

    Applied physics express 4(12), 126401-126401-3, 2011-12-25

    The Japan Society of Applied Physics

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各種コード

  • NII論文ID(NAID)
    10030154315
  • NII書誌ID(NCID)
    AA12295133
  • 本文言語コード
    EN
  • 資料種別
    SHO
  • ISSN
    18820778
  • NDL 記事登録ID
    023385782
  • NDL 請求記号
    Z78-A526
  • データ提供元
    CJP書誌  NDL  JSAP 
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