A Simple Method Based on Vision for Obtaining Depth Information in Nanomanipulation

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著者

    • Shao Bing Shao Bing
    • State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin 150001, China
    • Sun Lining
    • Center of Robotics and Microsystems, Soochow University, Suzhou, Jiangsu 215021, China

抄録

Nanomanipulation system based on scanning electron microscopes (SEM) provides researchers with an increasing ability to interact with objects at the nanoscale. But it is difficult to accomplish a nanomanipulation task due to the lack of the depth information. This paper presents a vision-based method for detecting the contact between an end-effector and a target surface inside an SEM without adding any extra facility or sensor. The theory analysis of contact detection is given. The experimental results show that the proposed vision-based method is capable of obtaining contact points two times (approach and retract) in one contact detection process and achieving a one-pixel detection accuracy about 20 nm at 10000\times magnification.

収録刊行物

  • Applied physics express

    Applied physics express 4(12), 126601-126601-3, 2011-12-25

    The Japan Society of Applied Physics

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各種コード

  • NII論文ID(NAID)
    10030154417
  • NII書誌ID(NCID)
    AA12295133
  • 本文言語コード
    EN
  • 資料種別
    SHO
  • ISSN
    18820778
  • NDL 記事登録ID
    023385809
  • NDL 請求記号
    Z78-A526
  • データ提供元
    CJP書誌  NDL  JSAP 
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