Dependence of Tracking Error Characteristics of In-Line-Type Differential Push-Pull Methods on Arrangement Error of Segmented Gratings
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- SHINODA Masahisa
- Advanced Technology R&D Center, Mitsubishi Electric Corporation
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- NAKAI Kenya
- Advanced Technology R&D Center, Mitsubishi Electric Corporation
Search this article
Journal
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- Optical review
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Optical review 18 (5), 367-373, 2011-10-01
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Keywords
Details 詳細情報について
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- CRID
- 1573387450580983040
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- NII Article ID
- 10030156311
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- NII Book ID
- AA11029291
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- ISSN
- 13406000
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- Text Lang
- en
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- Data Source
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- CiNii Articles