Infrared-Light Interferometry and a Phase-Stepping Algorithm for Measuring the Three-Dimensional Topography of Components Covered with GaAs or Si

この論文をさがす

著者

    • CHOU Xiujian
    • Key Laboratory of Instrumentation Science and Dynamic Measurement, North University of China, Ministry of Education National Key Laboratory of Science and Technology on Electronic Test and Measurement
    • NIU Kangkang
    • Key Laboratory of Instrumentation Science and Dynamic Measurement, North University of China, Ministry of Education National Key Laboratory of Science and Technology on Electronic Test and Measurement
    • LIU Yi
    • Key Laboratory of Instrumentation Science and Dynamic Measurement, North University of China, Ministry of Education National Key Laboratory of Science and Technology on Electronic Test and Measurement
    • XUE Chenyang
    • Key Laboratory of Instrumentation Science and Dynamic Measurement, North University of China, Ministry of Education National Key Laboratory of Science and Technology on Electronic Test and Measurement
    • LIU Jun
    • Key Laboratory of Instrumentation Science and Dynamic Measurement, North University of China, Ministry of Education National Key Laboratory of Science and Technology on Electronic Test and Measurement
    • ZHANG Wendong
    • Key Laboratory of Instrumentation Science and Dynamic Measurement, North University of China, Ministry of Education National Key Laboratory of Science and Technology on Electronic Test and Measurement

収録刊行物

  • Optical review

    Optical review 19(1), 34-38, 2012-02-01

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各種コード

  • NII論文ID(NAID)
    10030156715
  • NII書誌ID(NCID)
    AA11029291
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    13406000
  • データ提供元
    CJP書誌 
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