プラズマCVD法により作製した窒素添加DLCの構造とトライボロジー特性

• 山本 修二

  三恵技研工業 (株)

• 日高 徳昭

  早稲田大学 大学院基幹理工学研究科

• 川名 淳雄

  日本コーティングセンター(株)

• 増田 千利

  早稲田大学 大学院基幹理工学研究科

書誌事項

タイトル別名

• Structure and Tribological Behavior of Nitrogenated Diamond-Like Carbon Films Prepared by Plasma CVD
• プラズマ CVDホウ ニ ヨリ サクセイ シタ チッソ テンカ DLC ノ コウゾウ ト トライボロジー トクセイ

抄録

The correlation between wear resistance and the chemical state of the elements of nitrogenated diamond-like carbon films (NDLC) is characterized and discussed in this paper. NDLC have been deposited on tungsten-carbide, silicon and glass substrates by rf plasma chemical vapor deposition from C₆H₆-N₂ mixtures. The nitrogen content in the films measured by electron microprobe analysis was found to be proportional to the N₂ flow rate. X-ray diffraction pattern indicated that the diamond-like carbon (DLC) and NDLC were an amorphous structure. X-ray photoelectron spectroscopy measurement (XPS), which probed the chemical state of elements of the films, indicated that the sp³/sp² ratio went down as nitrogen content increased. Raman spectra of the films showed that the intensity ratio (I_D/I_G) of D band to G band increased with increasing nitrogen content. Electric resistivity of NDLC drastically reduced compared with that of DLC. The friction coefficients of the films, which were determined by the ball-on-disk test, increased with increasing nitrogen content, whereas the friction coefficient dependence on load was not observed in each film. The wear rate of NDLC was bigger than that of DLC. The wear mode of DLC showed adhesive wear. However, that of NDLC was abrasive wear. The film hardness measured by Berkovich stylus, which decreased with increasing nitrogen content, was found to be dependent on the sp³/sp² ratio.

収録刊行物

• 表面技術

  表面技術 63 (1), 35-, 2012

  一般社団法人 表面技術協会

キーワード

• Nitrogenated Diamond-Like Carbon
• C₆H₆
• XPS
• Raman
• sp²
• sp³
• Ball-On-Disk
• Adhesive Wear
• Abrasive Wear
• Hardness

詳細情報

• CRID: 1390282679095365248
• NII論文ID: 10030476322
• NII書誌ID: AN1005202X
• DOI: 10.4139/sfj.63.35
• COI: 1:CAS:528:DC%2BC38XisVKitLg%3D
• ISSN: 18843409
• ISSN: 09151869
• NDL書誌ID: 023459179
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I023459179
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• 抄録ライセンスフラグ: 使用不可