プラズマCVD法により作製した窒素添加DLCの構造とトライボロジー特性 Structure and Tribological Behavior of Nitrogenated Diamond-Like Carbon Films Prepared by Plasma CVD
The correlation between wear resistance and the chemical state of the elements of nitrogenated diamond-like carbon films (NDLC) is characterized and discussed in this paper. NDLC have been deposited on tungsten-carbide, silicon and glass substrates by rf plasma chemical vapor deposition from C<sub>6</sub>H<sub>6</sub>-N<sub>2</sub> mixtures. The nitrogen content in the films measured by electron microprobe analysis was found to be proportional to the N<sub>2</sub> flow rate. X-ray diffraction pattern indicated that the diamond-like carbon (DLC) and NDLC were an amorphous structure. X-ray photoelectron spectroscopy measurement (XPS), which probed the chemical state of elements of the films, indicated that the sp<sup>3</sup>/sp<sup>2</sup> ratio went down as nitrogen content increased. Raman spectra of the films showed that the intensity ratio (I<sub>D</sub>/I<sub>G</sub>) of D band to G band increased with increasing nitrogen content. Electric resistivity of NDLC drastically reduced compared with that of DLC. The friction coefficients of the films, which were determined by the ball-on-disk test, increased with increasing nitrogen content, whereas the friction coefficient dependence on load was not observed in each film. The wear rate of NDLC was bigger than that of DLC. The wear mode of DLC showed adhesive wear. However, that of NDLC was abrasive wear. The film hardness measured by Berkovich stylus, which decreased with increasing nitrogen content, was found to be dependent on the sp<sup>3</sup>/sp<sup>2</sup> ratio.
- 表面技術 = The journal of the Surface Finishing Society of Japan
表面技術 = The journal of the Surface Finishing Society of Japan 63(1), 35-40, 2012-01-01
The Surface Finishing Society of Japan