Study on the Correlation between Surface Properties and Tribological Performance of S-DLC Films

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DLC films deposited from C<sub>2</sub>H<sub>2</sub> and SF<sub>6</sub> mixtures were used to study the correlation between the surface properties and the tribological performance of sulfur-incorporated DLCfilms prepared by PBII process. The elemental content of the films was analyzed by Auger electron spectroscopy, and the surface properties of the films were measured by contact angle measurement. The hardness and elastic modulus of the films were measured by nano-indentation hardness testing. The average surface roughness was measured by atomic force microscope. The tribological performances of the films were evaluated using a ball-on-disk friction tester. The results of the study do not show any direct correlation between the surface contact angle, the surface energy, the polar force, the wettability, and the tribological performance of S-DLC films. Sulfur incorporation did not lead to significant changes in the surface roughness, but it did lead to changes in the surface contact angle, the surface energy and the polar force. With 2.9 %–4.3 % sulfur, the surface exhibited low wetting and sticking tendencies, and the surface contact angle increased, while the surface energy and the polar force decreased. The best tribological performance was observed at a bias voltage of −5 kV with 4.3 % sulfur, which nearly had the poorest wettability. At the same time, the S-DLC films with the highest polar force and the best wettability performance did not exhibit the lowest friction coefficient because of the transfer of the film and the high hardness and elastic modulus. Moreover, the surface energy and the surface contact angle measurements were performed on the molecular level, while the tribological tests were run at the macro-level and the shear forces were in the kN range.

収録刊行物

  • 表面技術 = The journal of the Surface Finishing Society of Japan

    表面技術 = The journal of the Surface Finishing Society of Japan 63(1), 53-57, 2012-01-01

    一般社団法人 表面技術協会

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各種コード

  • NII論文ID(NAID)
    10030476372
  • NII書誌ID(NCID)
    AN1005202X
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    09151869
  • NDL 記事登録ID
    023459260
  • NDL 請求記号
    Z17-291
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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