Study on the Correlation between Surface Properties and Tribological Performance of S-DLC Films

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DLC films deposited from C2H2 and SF6 mixtures were used to study the correlation between the surface properties and the tribological performance of sulfur-incorporated DLCfilms prepared by PBII process. The elemental content of the films was analyzed by Auger electron spectroscopy, and the surface properties of the films were measured by contact angle measurement. The hardness and elastic modulus of the films were measured by nano-indentation hardness testing. The average surface roughness was measured by atomic force microscope. The tribological performances of the films were evaluated using a ball-on-disk friction tester. The results of the study do not show any direct correlation between the surface contact angle, the surface energy, the polar force, the wettability, and the tribological performance of S-DLC films. Sulfur incorporation did not lead to significant changes in the surface roughness, but it did lead to changes in the surface contact angle, the surface energy and the polar force. With 2.9 %–4.3 % sulfur, the surface exhibited low wetting and sticking tendencies, and the surface contact angle increased, while the surface energy and the polar force decreased. The best tribological performance was observed at a bias voltage of −5 kV with 4.3 % sulfur, which nearly had the poorest wettability. At the same time, the S-DLC films with the highest polar force and the best wettability performance did not exhibit the lowest friction coefficient because of the transfer of the film and the high hardness and elastic modulus. Moreover, the surface energy and the surface contact angle measurements were performed on the molecular level, while the tribological tests were run at the macro-level and the shear forces were in the kN range.

収録刊行物

  • 表面技術

    表面技術 63 (1), 53-, 2012

    一般社団法人 表面技術協会

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