単一化学気相反応プロセスによるサブミクロンサイズのパーマロイ微粉の合成 Preparation of Submicron-size Permalloy Fine Particles by a Single Chemical Vapor Deposition Process
Fine particles of permalloy (80wt%Ni-20wt%Fe) were prepared by a CVD (chemical vapor deposition) method using the original quartz reactor. The mixture of FeCl<SUB>2</SUB> and NiCl<SUB>2</SUB> was vaporized and reduced to Ni-Fe fine particles in H<SUB>2</SUB> flow. The average particle diameter was 0.17 micrometer. The particle composition was controlled by the change of the reaction temperature and reaction time. The initial permeability and density of 80wt%Ni-20wt%Fe particles synthesized at 950°C were almost the same to those of the bulk alloys.
粉体および粉末冶金 58(11), 645-648, 2011-11-15
Japan Society of Powder and Powder Metallurgy