Fabrication of Micro Patterned Ceramic Structure by Imprinting Process

• Xu Yang

  Dept. Intelligent Machinery and Systems, Graduate School of Kyushu University

• Tsumori Fujio

  Dept. Mechanical Engineering, Kyushu University

• Kang Hyungoo

  Dept. Mechanical Engineering, Kyushu University

• Miura Hideshi

  Dept. Mechanical Engineering, Kyushu University

Abstract

In this report, an improved fabrication method of micro powder imprinting (μPI), which has the industrial value in reducing of the cost and procedures, is introduced to fabricate the thin yttria-stabilized zirconia (YSZ) sheet with the micrometer scale patterns. The Kapton film mold was designed and employed in thermal imprinting in order to prevent the breakage of sheet as mold removing. After imprinting, debinding and sintering procedures, the well pattern consistence line and space patterns in scale of 8 μm were obtained on 300 μm thick ceramic sheets. The morphology of sintered ceramic patterns was observed and the behaviors of debinding and sintering were investigated in this report. Meanwhile, the imprinting on bilayer ceramic sheet was carried out and the results showed the well wave interface of each layer, which have the potential utilization for solid oxide fuel cell directly.

Journal

• Journal of the Japan Society of Powder and Powder Metallurgy

  Journal of the Japan Society of Powder and Powder Metallurgy 58 (11), 673-678, 2011

  Japan Society of Powder and Powder Metallurgy

Keywords

• ceramic thin sheet
• YSZ
• Micro Powder Imprinting
• μPI
• SOFC

Details

• CRID: 1390001206311204096
• NII Article ID: 10030479483
• NII Book ID: AN00222724
• DOI: 10.2497/jjspm.58.673
• COI: 1:CAS:528:DC%2BC3MXhsFKksLbE
• ISSN: 18809014
• ISSN: 05328799
• NDL BIB ID: 023350089
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I023350089
• Text Lang: en
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed