Plasma Chemical Vaporization Machining with a Pipe Electrode for Optical Fabrication: a Review
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- Takino Hideo
- Lens Engineering Development Department, Nikon Corporation
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Plasma chemical vaporization machining (CVM) has been proposed as a high-precision chemical shaping method, which uses rf plasma generated in the proximity of an electrode in an atmospheric environment. Based on the principle of plasma CVM, a computer numerically controlled plasma CVM device with a pipe electrode was proposed for optical fabrication. This paper reviews the plasma CVM device, its removal characteristics, and the fabrication results of glass optics by use of the device
収録刊行物
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- International Journal of Electrical Machining
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International Journal of Electrical Machining 17 (0), 1-6, 2012
一般社団法人 電気加工学会
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詳細情報
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- CRID
- 1390282680733159680
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- NII論文ID
- 10030521458
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- NII書誌ID
- AN10564586
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- ISSN
- 21885117
- 13417908
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- NDL書誌ID
- 028572880
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可