マイクロポンプ-センサ一体集積化デバイスの試作 [in Japanese] Trial Production of Integrated Device for Micro-pump and Sensor [in Japanese]
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The DNA transistor is quick, easy and useful sensor of DNA sequencing. But its sequencing requires some chemical liquids and we need external pumps and tubes to provide to the sensor. As a result, the sequencing system is so complex and large. To improve sequencing tools, we consider the integrated system of sensor with pump. In this study, we present the integrated system of sensor (pH sensor) with micro-pump and the monolithic process of the integrated device. We evaluate the micro-pump driving of some liquid samples using pH sensor.
- IEEJ Transactions on Sensors and Micromachines
IEEJ Transactions on Sensors and Micromachines 132(4), 86-90, 2012-04-01
The Institute of Electrical Engineers of Japan