電気化学的手法による機能マイクロ・ナノ構造体形成プロセス  [in Japanese] Electrochemical fabrication processes for functional micro and nano scale structures  [in Japanese]

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Abstract

<p>電解析出法や陽極酸化法などの電気化学プロセスによる微細構造体形成プロセスについて,最近の検討事例を紹介した.微細パターン基板に電解析出プロセスを適用することにより,十数nmサイズの強磁性ナノドットアレイの形成が可能である.また,Si単結晶ウェーハに光照射を援用した陽極酸化プロセスを適用することにより,位置選択的に所望のサイズの微細孔アレイを形成可能であり,さらにその表面に種々の処理を施すことにより,微細なガラスチューブアレイや金属ニードルアレイを形成できることを示した.</p>

<p>Electrochemical processes for micro and nano scale fabrication were overviewed and some of the recent results including these processes were described. By using an electrodeposition process in combination with patterned substrates, ferromagnetic nanodot arrays, which were applicable to bit patterned media for ultra high-density data storage devices, were prepared. Also, a templated electrochemical etching process for a Si single crystal wafer, which could form an array of micro scale pores with controlled dimensions and suitable for the fabrication of arrays of glass tubes or metal needles, was described.</p>

Journal

  • Oyo Buturi

    Oyo Buturi 81(5), 406-409, 2012-05-10

    The Japan Society of Applied Physics

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Codes

  • NII Article ID (NAID)
    10030594692
  • NII NACSIS-CAT ID (NCID)
    AN00026679
  • Text Lang
    JPN
  • Article Type
    REV
  • ISSN
    03698009
  • NDL Article ID
    023759954
  • NDL Call No.
    Z15-243
  • Data Source
    CJP  NDL  J-STAGE 
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