Progress and prospect of the growth of wide-band-gap group III nitrides: Development of the growth method for single-crystal bulk GaN

  • AMANO Hiroshi
    Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University Akasaki Research Center, Nagoya University

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  • 窒化物ワイドギャップ半導体の現状と展望―バルクGaN単結晶成長技術開発の観点から
  • チッカブツ ワイドギャップ ハンドウタイ ノ ゲンジョウ ト テンボウ : バルク GaNタンケッショウ セイチョウ ギジュツ カイハツ ノ カンテン カラ

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Abstract

<p>GaN-based blue LEDs and HFETs are generally grown on foreign substrates, such as sapphire and Si. The dislocation density of the GaN grown on foreign substrates exceeds the mid 108cm-2 range, although the performance characteristics of the LEDs and HFETs are sufficiently high for their practical use. Theoretically, much higher performance devices can be expected using low-dislocation-density GaN substrates. In this review, the progress and prospects of the GaN substrate are described.</p>

Journal

  • Oyo Buturi

    Oyo Buturi 81 (6), 455-463, 2012-06-10

    The Japan Society of Applied Physics

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