Progress and prospect of the growth of wide-band-gap group III nitrides: Development of the growth method for single-crystal bulk GaN
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- AMANO Hiroshi
- Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University Akasaki Research Center, Nagoya University
Bibliographic Information
- Other Title
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- 窒化物ワイドギャップ半導体の現状と展望―バルクGaN単結晶成長技術開発の観点から
- チッカブツ ワイドギャップ ハンドウタイ ノ ゲンジョウ ト テンボウ : バルク GaNタンケッショウ セイチョウ ギジュツ カイハツ ノ カンテン カラ
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Abstract
<p>GaN-based blue LEDs and HFETs are generally grown on foreign substrates, such as sapphire and Si. The dislocation density of the GaN grown on foreign substrates exceeds the mid 108cm-2 range, although the performance characteristics of the LEDs and HFETs are sufficiently high for their practical use. Theoretically, much higher performance devices can be expected using low-dislocation-density GaN substrates. In this review, the progress and prospects of the GaN substrate are described.</p>
Journal
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- Oyo Buturi
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Oyo Buturi 81 (6), 455-463, 2012-06-10
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390845702290838272
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- NII Article ID
- 10030594790
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- NII Book ID
- AN00026679
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- ISSN
- 21882290
- 03698009
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- NDL BIB ID
- 023822518
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- CiNii Articles
- KAKEN
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- Abstract License Flag
- Disallowed