X-ray Microbeam Three-Dimensional Topography Imaging and Strain Analysis of Basal-Plane Dislocations and Threading Edge Dislocations in 4H-SiC

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著者

    • Tanuma Ryohei Tanuma Ryohei
    • Materials Science Research Laboratory, Central Research Institute of Electric Power Industry (CRIEPI), Yokosuka, Kanagawa 240-0101, Japan
    • Mori Daisuke Mori Daisuke
    • Applied Physics Research Department, Advanced Technology Laboratory, Fuji Electric Co., Ltd., Hino, Tokyo 191-8502, Japan
    • Kamata Isaho [他] Kamata Isaho
    • Materials Science Research Laboratory, Central Research Institute of Electric Power Industry (CRIEPI), Yokosuka, Kanagawa 240-0101, Japan
    • Tsuchida Hidekazu
    • Materials Science Research Laboratory, Central Research Institute of Electric Power Industry (CRIEPI), Yokosuka, Kanagawa 240-0101, Japan

抄録

This paper demonstrates the X-ray microbeam three-dimensional (3D) topography of basal-plane dislocations (BPDs) and threading edge dislocations (TEDs) in 4H-SiC. Stereographic images showing the propagation of BPDs from a substrate to an epilayer and the conversion of BPDs into TEDs near the epilayer/substrate interface are successfully obtained. The narrowing of BPD images is observed just before the BPD-TED conversion points. The images of effective misorientations \Delta\omega provide a spatial resolution of 1--2 μm for a TED, and the range of \Delta\omega corresponds to strains on the order of \pm 10^{-5}. We also discuss the image-formation mechanism in 3D topography.

収録刊行物

  • Applied physics express

    Applied physics express 5(6), 061301-061301-3, 2012-06-25

    The Japan Society of Applied Physics

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各種コード

  • NII論文ID(NAID)
    10030769570
  • NII書誌ID(NCID)
    AA12295133
  • 本文言語コード
    EN
  • 資料種別
    SHO
  • ISSN
    18820778
  • NDL 記事登録ID
    023762674
  • NDL 請求記号
    Z78-A526
  • データ提供元
    CJP書誌  NDL  JSAP 
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