A Novel Coating Method for Rare Earth Metal Oxide Films and Their Tribological Properties(Part 2)

• NAGAI Kazuhiro

  Kobe University

• HARADA Shogo

  Kobe University Sony Corporation

• YAMAMOTO Shunsuke

  Kobe University Kubota Corporation

• MIZUMOTO Hiroki

  Kobe University

• OHMAE Nobuo

  Graduate School of Engineering, Kobe University

Bibliographic Information

Other Title

• 希土類酸化物薄膜の新規な創製法の確立とそのトライボロジー特性（第2報）
• 希土類酸化物薄膜の新規な創製法の確立とそのトライボロジー特性(第2報)イットリウム酸化物薄膜
• キドルイ サンカブツ ハクマク ノ シンキ ナ ソウセイホウ ノ カクリツ ト ソノ トライボロジー トクセイ(ダイ2ホウ)イットリウム サンカブツ ハクマク
• ―Yttrium Oxide Film―
• ―イットリウム酸化物薄膜―

Abstract

Yttrium oxide, Y₂O₃, was deposited on a Si (001) substrate in ultrahigh vacuum by the simultaneous irradiation of arc plasma of yttrium and hyperthermal atomic oxygen, the principles and procedures of which were introduced in the preceding article. X-ray photoelectron spectroscopy revealed that the stoichiometry of Y₂O₃ was identical from the top to the bottom of the film. Y₂O₃ film deposited at a substrate temperature of 300℃, followed by a post-annealing process at 700℃, showed a low friction coefficient of approximately 0.1. At ＋high deposition temperatures, e.g. 500℃ and 700℃, faint Si2p peak was detected at an early stage of Ar depth profiling. Presumably, this may lead to inferior film properties. Low friction as well as good adhesion property of Y₂O₃ film to the Si(001) seems applicable to protective coating of MEMS (microelectromechanical systems) and other Si technologies.

Journal

• JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS

  JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS 57 (8), 560-567, 2012-08-15

  Japanese Society of Tribologists

Keywords

• rare earth metal
• thin oxide films
• atomic oxygen beam
• coating method
• friction coefficient

Details

• CRID: 1390002184873319680
• NII Article ID: 10030944765
• NII Book ID: AN10056166
• DOI: 10.18914/tribologist.57.08_560
• ISSN: 21899967
• ISSN: 09151168
• NDL BIB ID: 023938738
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I023938738
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed