Growth and Dielectric Characterization of Yttrium Oxide Thin Films Deposited on Si by r.f.-Magnetron Sputtering

Author(s)

Journal

  • Thin Solid films

    Thin Solid films 226, 156, 1993

Cited by:  1

Codes

  • NII Article ID (NAID)
    10030944780
  • Article Type
    Journal Article
  • Data Source
    CJPref 
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