Control of interlayer on MOVPE growth of AlN on sapphire substrate

• MIYAGAWA Reina

  Department, Mie University

• YANG Shibo

  Department, Mie University

• MIYAKE Hideto

  Department, Mie University

• HIRAMATSU Kazumasa

  Department, Mie University

• KUWAHARA Takaaki

  Department of Applied Science for Electronics and Materials, Kyushu University

• MITSUHARA Masatoshi

  Department of Applied Science for Electronics and Materials, Kyushu University

• KUWANO Noriyuki

  Department of Applied Science for Electronics and Materials, Kyushu University

Bibliographic Information

Other Title

• サファイア基板上へのAlNのMOVPE成長における中間層制御

Journal

• 電子情報通信学会技術研究報告. ED, 電子デバイス

  電子情報通信学会技術研究報告. ED, 電子デバイス 111 (290), 5-10, 2011-11-10

Keywords

• AlN
• MOVPE
• sapphire
• interlayer

Details

• CRID: 1573668925936873216
• NII Article ID: 10031103898
• NII Book ID: AN10012954
• Text Lang: ja
• Data Source:
  • CiNii Articles