Development of High Accuracy Spray Coating Method using Multi-layer Coat

• Akamatsu Mikio

  Faculty of Engineering, Kagawa University

• Terao Kyohei

  Faculty of Engineering, Kagawa University

• Takao Hidekuni

  Faculty of Engineering, Kagawa University

• Simokawa Fusao

  Faculty of Engineering, Kagawa University

• Oohira Fumikazu

  Faculty of Engineering, Kagawa University

• Suzuki Takaaki

  Faculty of Engineering, Kagawa University

Bibliographic Information

Other Title

• 多層塗布による高精度厚膜スプレーコート法の開発
• タソウ トフ ニ ヨル コウセイド アツマク スプレーコートホウ ノ カイハツ

Abstract

In this paper, we propose a high-accuracy spray coating method for obtaining the thick photoresist over 200μm. A multi-layered coating method with thin photoresist layers is applied in order to achieve a thick photoresist. We evaluated the waviness and the reproducibility of the thickness of the photoresist coated on a flat substrate. The multi-layered spray coating method with the edge cover achieves high accuracy thickness of the photoresist with covering wide-range of the target thickness.

Journal

• IEEJ Transactions on Sensors and Micromachines

  IEEJ Transactions on Sensors and Micromachines 133 (5), 170-176, 2013

  The Institute of Electrical Engineers of Japan

Keywords

• spray coat
• photoresist
• SU-8
• multi-layered coating

Details

• CRID: 1390282679437581952
• NII Article ID: 10031167014
• NII Book ID: AN1052634X
• DOI: 10.1541/ieejsmas.133.170
• ISSN: 13475525
• ISSN: 13418939
• NDL BIB ID: 024671246
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I024671246
• Web Site: https://www.jstage.jst.go.jp/article/ieejsmas/133/5/133_170/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed