A High-Temperature Nitrogen Plasma Etching for Preserving Smooth and Stoichiometric GaN Surface

• Ryosuke Kometani

• Kenji Ishikawa

• Keigo Takeda

Journal

• Applied physics express : APEX

  Applied physics express : APEX 6 (5), 056201-, 2013-05

  Tokyo : Japan Society of Applied Physics

Keywords

• General Physics and Astronomy
• General Engineering

Details

• CRID: 1522262180733318144
• NII Article ID: 10031174341
• NII Book ID: AA12295133
• ISSN: 18820778
• ISSN: 18820786
• ISSN: http://id.crossref.org/issn/18820786
• DOI: 10.7567/apex.6.056201
• NDL BIB ID: 024520442
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I024520442
• Web Site: http://stacks.iop.org/1882-0786/6/i=5/a=056201/pdf
• Text Lang: en
• NDL Source Classification:
  • ZM35(科学技術--物理学)
• Data Source:
  • NDL
  • Crossref
  • CiNii Articles